Products
Atomic layer deposition system
AFALD-8
A capacitive-coupling-type plasma source is installed, enabling the deposition of high-quality thin films at low temperatures. A wide range of materials can be deposited by using gases of various materials for ALD.
- Superior Step Coverage
- Precise Thickness Control
- Pinhole-free
- Low Damage
ALD method is a thin film deposition method realizing superior step coverage and film-thickness controllability. Even in the structure having high aspect ratio or complex 3D configuration, it is possible to form thin films controlled at the atomic level. In addition to the conventional benefit of ALD, AFALD ensures the deposition of high-density and high-quality films by enhancing the reactivity using a plasma precisely controlled in milliseconds order. This system can accommodate max. four metal precursors and max. three reactive gases, and by combining it with a proper transfer module, all your needs from R&D to massproduction can be met.
- Product Features
- Standard specification
- ALD Principle
Standard mounted CCP plasma source
- Controllable in milliseconds for low-damage
- stable deposition.
Wide range of option selection
- Transfer system can be selected from manual loader to cluster module type loader.
- The number of material vaporizers and reactive gases are selectable.
| Item | Full Cluster Type | Compact Cluster Type | Load-lock Type |
|---|---|---|---|
| Configuration |  |
 |
 |
| Process Modules | Max. 3 | 1 | 1 |
| Transfer Robot | W Arm | Single Arm | Linear Actuator （Auto/Manual） |
| Load-Locks | Max. 2 | 1 | 1 |
| Sub Chambers | Max. 2 | Max. 2 | None |
Software that is powerful and easy to operate
- Interface enabling the intuitive operation
- Configuration function which can be set arbitrarily
- Standard installed abundant log functions.
Easy maintenance by well-designed Inner-Chamber.
Designed for lower material cost
A unique patented vaporizer having excellent material consumption efficiency by controlling the feeding pressure is adopted.
Drawing & Diagram
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TEL 045-787-7203 / FAX 045-787-8472
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